Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805932 | Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light | Shinichi Kato, Kenichi Yokouchi | 2017-10-31 |
| 9799517 | Apparatus and method for light-irradiation heat treatment | Hideaki Tanimura, Kaoru Matsuo, Shinichi Kato | 2017-10-24 |
| 9741576 | Light irradiation type heat treatment method and heat treatment apparatus | Takayuki Aoyama, Hikaru Kawarazaki, Masashi Furukawa, Hideaki Tanimura, Shinichi Kato | 2017-08-22 |