Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9769880 | Semiconductor manufacturing method and semiconductor manufacturing apparatus | Shinichi Kato | 2017-09-19 |
| 9741576 | Light irradiation type heat treatment method and heat treatment apparatus | Hikaru Kawarazaki, Masashi Furukawa, Kazuhiko Fuse, Hideaki Tanimura, Shinichi Kato | 2017-08-22 |