Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837266 | Method and apparatus for heat-treating high dielectric constant film | — | 2017-12-05 |
| 9741576 | Light irradiation type heat treatment method and heat treatment apparatus | Takayuki Aoyama, Masashi Furukawa, Kazuhiko Fuse, Hideaki Tanimura, Shinichi Kato | 2017-08-22 |
| 9557110 | Method and apparatus for heat-treating high dielectric constant film | — | 2017-01-31 |