Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831108 | Thermal processing apparatus and thermal processing method for heating substrate by light irradiation | Nobuhiko Nishide | 2017-11-28 |
| 9805932 | Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light | Kazuhiko Fuse, Shinichi Kato | 2017-10-31 |
| 9633868 | Heat treatment method and heat treatment apparatus | — | 2017-04-25 |