Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831108 | Thermal processing apparatus and thermal processing method for heating substrate by light irradiation | Kenichi Yokouchi | 2017-11-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831108 | Thermal processing apparatus and thermal processing method for heating substrate by light irradiation | Kenichi Yokouchi | 2017-11-28 |