Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9658114 | Device for measuring point diffraction interferometric wavefront aberration and method for detecting wave aberration | Feng Tang, Xiangzhao Wang, Fudong Guo, Yunjun Lu | 2017-05-23 |
| 9618858 | Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table | Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Gerardus Adrianus Antonius Maria Kusters, Thibault Simon Mathieu Laurent, Marcio Alexandre Cano Miranda +2 more | 2017-04-11 |