Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9766154 | Multi field point aberration parallel metrology device and method for lithographic projection lens | Fengzhao Dai, Feng Tang, Yazhong Zheng | 2017-09-19 |
| 9658114 | Device for measuring point diffraction interferometric wavefront aberration and method for detecting wave aberration | Feng Tang, Peng Feng, Fudong Guo, Yunjun Lu | 2017-05-23 |