Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805905 | Blanking device for multi-beam of charged particle writing apparatus using multi-beam of charged particle and defective beam blocking method for multi-beam of charged particle | Hiroshi Yamashita, Kazuhiro Chiba, Hiroshi Matsumoto | 2017-10-31 |
| 9691585 | Multi charged particle beam writing method, and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Munehiro Ogasawara | 2017-06-27 |
| 9570267 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Tomohiro Iijima, Munehiro Ogasawara, Hideo Inoue | 2017-02-14 |