Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805905 | Blanking device for multi-beam of charged particle writing apparatus using multi-beam of charged particle and defective beam blocking method for multi-beam of charged particle | Hiroshi Yamashita, Ryoichi Yoshikawa, Hiroshi Matsumoto | 2017-10-31 |