Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9570267 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Munehiro Ogasawara, Hideo Inoue, Ryoichi Yoshikawa | 2017-02-14 |