Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748074 | Data generating apparatus, energy beam writing apparatus, and energy beam writing method | — | 2017-08-29 |
| 9691585 | Multi charged particle beam writing method, and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Ryoichi Yoshikawa | 2017-06-27 |
| 9570267 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Tomohiro Iijima, Hideo Inoue, Ryoichi Yoshikawa | 2017-02-14 |