Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9715992 | Integrated optical and charged particle inspection apparatus | Jacob Pieter Hoogenboom, Nalan Liv, Aernout Christiaan Zonnevylle | 2017-07-25 |
| 9697985 | Apparatus and method for inspecting a surface of a sample | Ali Mohammadi-Gheidari, Yan Ren | 2017-07-04 |
| 9665013 | Lithography system, method of clamping and wafer table | Guido De Boer, Michel Pieter Dansberg | 2017-05-30 |
| 9645511 | Lithography system, method of clamping and wafer table | Guido De Boer, Michel Pieter Dansberg | 2017-05-09 |
| 9607806 | Charged particle multi-beam apparatus including a manipulator device for manipulation of one or more charged particle beams | Aernout Christiaan Zonnevylle | 2017-03-28 |