Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9690215 | Interferometer module | Thomas Adrian Ooms, Niels Vergeer, Godefridus Cornelius Antonius Couweleers | 2017-06-27 |
| 9678443 | Lithography system with differential interferometer module | Thomas Adriaan Ooms, Niels Vergeer, Godefridus Cornelius Antonius Couweleers | 2017-06-13 |
| 9665013 | Lithography system, method of clamping and wafer table | Michel Pieter Dansberg, Pieter Kruit | 2017-05-30 |
| 9645511 | Lithography system, method of clamping and wafer table | Michel Pieter Dansberg, Pieter Kruit | 2017-05-09 |
| 9575418 | Apparatus for transferring a substrate in a lithography system | Vincent Sylvester Kuiper, Erwin Slot, Marcel Nicolaas Jacobus van Kervinck, Hendrik Jan De Jong | 2017-02-21 |