Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9665013 | Lithography system, method of clamping and wafer table | Guido De Boer, Pieter Kruit | 2017-05-30 |
| 9645511 | Lithography system, method of clamping and wafer table | Guido De Boer, Pieter Kruit | 2017-05-09 |