Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9690215 | Interferometer module | Guido De Boer, Thomas Adrian Ooms, Niels Vergeer | 2017-06-27 |
| 9678443 | Lithography system with differential interferometer module | Guido De Boer, Thomas Adriaan Ooms, Niels Vergeer | 2017-06-13 |
| 9551563 | Multi-axis differential interferometer | Thomas Adriaan Ooms, Niels Vergeer | 2017-01-24 |