Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9790591 | Titanium-containing film forming compositions for vapor deposition of titanium-containing films | Changhee Ko, Clément Lansalot-Matras, Julien Lieffrig, Hana Ishii | 2017-10-17 |
| 9633838 | Vapor deposition of silicon-containing films using penta-substituted disilanes | Jean-Marc Girard, Changhee Ko, Ivan Oshchepkov, Kazutaka Yanagita, Shingo Okubo +1 more | 2017-04-25 |
| 9543144 | Vapor deposition of chalcogenide-containing films | Hana Ishii, Nathanaelle Schneider | 2017-01-10 |