Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793120 | Device substrate, method of manufacturing device substrate, and method of manufacturing semiconductor device | Takahito Nishimura, Yoshihisa Kawamura, Kazuhiro Takahata, Yoshiharu Ono | 2017-10-17 |
| 9588418 | Pattern forming method | Naomi Shida, Kenji Todori, Shigehiko Mori, Reiko Yoshimura, Hiroyuki Kashiwagi +1 more | 2017-03-07 |
| 9550322 | Near-field exposure mask, resist pattern forming method, device manufacturing method, near-field exposure method, pattern forming method, near-field optical lithography member, and near-field nanoimprint method | Naomi Shida, Kenji Todori, Shigehiko Mori, Ko Yamada, Masakazu Yamagiwa +4 more | 2017-01-24 |