Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9588418 | Pattern forming method | Naomi Shida, Shigehiko Mori, Reiko Yoshimura, Hiroyuki Kashiwagi, Ikuo Yoneda +1 more | 2017-03-07 |
| 9550322 | Near-field exposure mask, resist pattern forming method, device manufacturing method, near-field exposure method, pattern forming method, near-field optical lithography member, and near-field nanoimprint method | Naomi Shida, Shigehiko Mori, Ko Yamada, Masakazu Yamagiwa, Reiko Yoshimura +4 more | 2017-01-24 |