Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793120 | Device substrate, method of manufacturing device substrate, and method of manufacturing semiconductor device | Yoshihisa Kawamura, Kazuhiro Takahata, Ikuo Yoneda, Yoshiharu Ono | 2017-10-17 |
| 9778209 | Substrate for mask blanks, mask blank, transfer mask, and method of manufacturing them | Kazuki Aoyama | 2017-10-03 |