Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9696626 | Composition for forming a resist underlayer film, and pattern-forming method | Fumihiro Toyokawa, Gouji Wakamatsu | 2017-07-04 |
| 9620378 | Composition for film formation, film, production method of patterned substrate, and compound | Goji Wakamatsu, Tsubasa Abe, Kazunori Sakai | 2017-04-11 |
| 9581905 | Composition for film formation, resist underlayer film and forming method thereof, pattern-forming method and compound | Fumihiro Toyokawa, Goji Wakamatsu, Shingo Takasugi, Tooru Kimura | 2017-02-28 |