Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9696626 | Composition for forming a resist underlayer film, and pattern-forming method | Shin-ya Nakafuji, Gouji Wakamatsu | 2017-07-04 |
| 9581905 | Composition for film formation, resist underlayer film and forming method thereof, pattern-forming method and compound | Shin-ya Nakafuji, Goji Wakamatsu, Shingo Takasugi, Tooru Kimura | 2017-02-28 |