Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9620378 | Composition for film formation, film, production method of patterned substrate, and compound | Shin-ya Nakafuji, Tsubasa Abe, Kazunori Sakai | 2017-04-11 |
| 9581905 | Composition for film formation, resist underlayer film and forming method thereof, pattern-forming method and compound | Shin-ya Nakafuji, Fumihiro Toyokawa, Shingo Takasugi, Tooru Kimura | 2017-02-28 |