Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9581905 | Composition for film formation, resist underlayer film and forming method thereof, pattern-forming method and compound | Shin-ya Nakafuji, Fumihiro Toyokawa, Goji Wakamatsu, Shingo Takasugi | 2017-02-28 |