Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9633846 | Internal plasma grid applications for semiconductor fabrication | Alex Paterson, Do-Young Kim, Gowri Kamarthy, Helene Del Puppo, Jen-Kan Yu +5 more | 2017-04-25 |
| 9589853 | Method of planarizing an upper surface of a semiconductor substrate in a plasma etch chamber | Monica Titus, Gowri Kamarthy, Harmeet Singh, Meihua Shen, Baosuo Zhou +2 more | 2017-03-07 |