Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9709386 | Apparatus and methods for measuring properties in a TSV structure using beam profile reflectometry | Lena Nicolaides, Raul V. Tan, Shifang Li | 2017-07-18 |
| 9640449 | Automated inline inspection of wafer edge strain profiles using rapid photoreflectance spectroscopy | Lena Nicolaides, Mohan Mahadevan, Paul Horn, Shifang Li | 2017-05-02 |