Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9773665 | Particle reduction in a physical vapor deposition chamber | Weimin Zeng, Yong Cao | 2017-09-26 |
| 9633824 | Target for PVD sputtering system | Yong Cao, Muhammad M. Rasheed, Xianmin Tang | 2017-04-25 |
| 9633839 | Methods for depositing dielectric films via physical vapor deposition processes | Weimin Zeng, Yana Cheng, Yong Cao, Daniel Lee Diehl, Srinivas Guggilla +2 more | 2017-04-25 |