Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9772297 | Apparatus and methods for combined brightfield, darkfield, and photothermal inspection | Lena Nicolaides, Mohan Mahadevan, Alex Salnik | 2017-09-26 |
| 9553034 | Combined semiconductor metrology system | Guoheng Zhao, Nanchang Zhu, Neeraj Khanna | 2017-01-24 |