Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9797042 | Single ALD cycle thickness control in multi-station substrate deposition systems | Hu Kang, Adrien LaVoie, Jun Qian | 2017-10-24 |
| 9725805 | Apparatus and method for controlled application of reactive vapors to produce thin films and coatings | Boris Kobrin, Richard Yi, Jeffrey D. Chinn | 2017-08-08 |