Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9568841 | Lithographic apparatus and device manufacturing method | Timotheus Franciscus Sengers, Marcus Adrianus Van De Kerkhof, Kees Van Weert | 2017-02-14 |
| 9541843 | Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2017-01-10 |