Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831062 | Method for pattern measurement, method for setting device parameters of charged particle radiation device, and charged particle radiation device | Makoto Suzuki, Satoru Yamaguchi, Kei Sakai, Miki Isawa, Satoshi Takada +1 more | 2017-11-28 |
| 9823065 | Surface measurement apparatus | Takanori Kondo, Takahiro Jingu, Masaaki Ito | 2017-11-21 |