Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9659751 | System and method for selective coil excitation in inductively coupled plasma processing reactors | Kartik Ramaswamy, Yang Yang, Steven Lane, Joseph AuBuchon, Travis Koh | 2017-05-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9659751 | System and method for selective coil excitation in inductively coupled plasma processing reactors | Kartik Ramaswamy, Yang Yang, Steven Lane, Joseph AuBuchon, Travis Koh | 2017-05-23 |