Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837265 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Martin Jay Seamons +5 more | 2017-12-05 |
| 9711360 | Methods to improve in-film particle performance of amorphous boron-carbon hardmask process in PECVD system | Ziqing Duan, Abdul Aziz Khaja, Amit Kumar BANSAL, Bok Hoen Kim, Prashant Kumar Kulshreshtha | 2017-07-18 |
| 9653327 | Methods of removing a material layer from a substrate using water vapor treatment | Sudha Rathi, Chiu Chan, Martin Jay Seamons, Bok Heon Kim | 2017-05-16 |
| 9646818 | Method of forming planar carbon layer by applying plasma power to a combination of hydrocarbon precursor and hydrogen-containing precursor | Patrick Reilly, David Alan Bethke | 2017-05-09 |