Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9741558 | Selectively lateral growth of silicon oxide thin film | Yihong Chen, Shaunak Mukherjee, Abhijit Basu Mallick | 2017-08-22 |
| 9659765 | Enhancement of modulus and hardness for UV-cured ultra low-k dielectric films | Kang Sub Yim, Mahendra CHHABRA, Alexandros T. Demos, Priyanka DASH | 2017-05-23 |
| 9613908 | Ultra-thin dielectric diffusion barrier and etch stop layer for advanced interconnect applications | Deenesh Padhi, Yihong Chen, Abhijit Basu Mallick, Alexandros T. Demos, Mukund Srinivasan | 2017-04-04 |