Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799486 | Charged particle beam apparatus for measuring surface potential of a sample | Seiichiro Kanno, Yasushi Ebizuka, Takafumi Miwa | 2017-10-24 |
| 9704731 | Plasma processing apparatus and plasma processing method | Masaru Izawa, Takumi Tandou | 2017-07-11 |