Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799486 | Charged particle beam apparatus for measuring surface potential of a sample | Yasushi Ebizuka, Go Miya, Takafumi Miwa | 2017-10-24 |
| 9666408 | Apparatus and method for processing sample, and charged particle radiation apparatus | Shuichi Nakagawa, Masaru Matsushima, Masakazu Takahashi | 2017-05-30 |
| 9601307 | Charged particle radiation apparatus | Masashi Fujita, Naoya Ishigaki, Makoto Nishihara, Kumiko Shimizu | 2017-03-21 |
| 9543113 | Charged-particle beam device for irradiating a charged particle beam on a sample | Yasushi Ebizuka, Naoya Ishigaki, Masashi Fujita | 2017-01-10 |