Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9734983 | Charged particle radiation apparatus | Daisuke Mutou, Masaki Mizuochi, Toshihiko Shimizu, Hirofumi Motoshiromizu, Eisuke Kamide | 2017-08-15 |
| 9666408 | Apparatus and method for processing sample, and charged particle radiation apparatus | Masaru Matsushima, Masakazu Takahashi, Seiichiro Kanno | 2017-05-30 |
| 9627173 | Stage device and charged particle beam apparatus using the stage device | Hironori Ogawa, Masaki Mizuochi, Tsukasa Sugawara | 2017-04-18 |