Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9673021 | Positioning control device | Tomohiro Inoue, Masaki Odai | 2017-06-06 |
| 9627173 | Stage device and charged particle beam apparatus using the stage device | Masaki Mizuochi, Shuichi Nakagawa, Tsukasa Sugawara | 2017-04-18 |