Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9633846 | Internal plasma grid applications for semiconductor fabrication | Alex Paterson, Do-Young Kim, Helene Del Puppo, Jen-Kan Yu, Monica Titus +5 more | 2017-04-25 |
| 9589853 | Method of planarizing an upper surface of a semiconductor substrate in a plasma etch chamber | Monica Titus, Harmeet Singh, Yoshie Kimura, Meihua Shen, Baosuo Zhou +2 more | 2017-03-07 |