Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9828672 | Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma | Bhadri N. Varadarajan, Bo Gong, Rachel E. Batzer, Huatan Qiu, Bart J. van Schravendijk | 2017-11-28 |