Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9673146 | Low temperature tungsten film deposition for small critical dimension contacts and interconnects | Raashina Humayun, Michal Danek, Anand Chandrashekar | 2017-06-06 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9673146 | Low temperature tungsten film deposition for small critical dimension contacts and interconnects | Raashina Humayun, Michal Danek, Anand Chandrashekar | 2017-06-06 |