EM

Erin Madden

MI Mks Instruments: 1 patents #17 of 53Top 35%
Overall (2017): #429,175 of 506,227Top 85%
1
Patents 2017

Issued Patents 2017

Patent #TitleCo-InventorsDate
9653266 Microwave plasma applicator with improved power uniformity Xing Chen, Chengxiang Ji, Ilya Pokidov, Kevin W. Wenzel 2017-05-16