XC

Xing Chen

MI Mks Instruments: 2 patents #3 of 53Top 6%
Overall (2017): #93,150 of 506,227Top 20%
2
Patents 2017

Issued Patents 2017

Patent #TitleCo-InventorsDate
9653266 Microwave plasma applicator with improved power uniformity Chengxiang Ji, Erin Madden, Ilya Pokidov, Kevin W. Wenzel 2017-05-16
9630142 Toroidal plasma abatement apparatus and method Ilya Pokidov, Feng Tian, Ken Tran, David Lam, Kevin W. Wenzel 2017-04-25