Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653266 | Microwave plasma applicator with improved power uniformity | Xing Chen, Chengxiang Ji, Erin Madden, Ilya Pokidov | 2017-05-16 |
| 9630142 | Toroidal plasma abatement apparatus and method | Xing Chen, Ilya Pokidov, Feng Tian, Ken Tran, David Lam | 2017-04-25 |