IP

Ilya Pokidov

MI Mks Instruments: 2 patents #3 of 53Top 6%
🗺 Massachusetts: #2,350 of 13,044 inventorsTop 20%
Overall (2017): #145,591 of 506,227Top 30%
2
Patents 2017

Issued Patents 2017

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
9653266 Microwave plasma applicator with improved power uniformity Xing Chen, Chengxiang Ji, Erin Madden, Kevin W. Wenzel 2017-05-16
9630142 Toroidal plasma abatement apparatus and method Xing Chen, Feng Tian, Ken Tran, David Lam, Kevin W. Wenzel 2017-04-25