DL

David Lam

MI Mks Instruments: 1 patents #17 of 53Top 35%
Overall (2017): #448,354 of 506,227Top 90%
1
Patents 2017

Issued Patents 2017

Patent #TitleCo-InventorsDate
9630142 Toroidal plasma abatement apparatus and method Xing Chen, Ilya Pokidov, Feng Tian, Ken Tran, Kevin W. Wenzel 2017-04-25