Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786044 | Method of measuring asymmetry, inspection apparatus, lithographic system and device manufacturing method | Andreas Fuchs, Peter Hanzen Wardenier, Maxime D'Alfonso, Hilko Dirk Bos | 2017-10-10 |
| 9753379 | Inspection apparatus and methods, methods of manufacturing devices | Henricus Petrus Maria Pellemans, Patrick Warnaar | 2017-09-05 |