Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9791780 | Exposure apparatus | Takashi Onose, Kouji Kakizaki, Osamu Wakabayashi | 2017-10-17 |
| 9616613 | Imprint apparatus including alignment and overlay measurement | Ken-ichiro Shinoda, Mitsuru Hiura | 2017-04-11 |
| 9541825 | Imprint apparatus and article manufacturing method | Ken-ichiro Shinoda, Mitsuru Hiura | 2017-01-10 |