Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9851634 | Imprint apparatus | Yozo Matsuda, Noriyasu Hasegawa, Tatsuya Hayashi | 2017-12-26 |
| 9616613 | Imprint apparatus including alignment and overlay measurement | Akiyoshi Suzuki, Ken-ichiro Shinoda | 2017-04-11 |
| 9541825 | Imprint apparatus and article manufacturing method | Ken-ichiro Shinoda, Akiyoshi Suzuki | 2017-01-10 |