Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9827756 | Separation apparatus, separation system, and separation method | Osamu Hirakawa, Masaru Honda, Xavier Francois Brun | 2017-11-28 |
| 9679798 | Substrate conveyance apparatus and substrate peeling system | Yasuharu Iwashita, Osamu Hirakawa, Yasutaka SOMA, Takeshi Tamura, Kazutaka Noda +1 more | 2017-06-13 |