Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9679798 | Substrate conveyance apparatus and substrate peeling system | Yasuharu Iwashita, Osamu Hirakawa, Yasutaka SOMA, Takeshi Tamura, Xavier Francois Brun +1 more | 2017-06-13 |